| 摘要 |
<p>A treating system where treating fluid is supplied into a treating container to treat an object to be treated, wherein the treating fluid is stably supplied into the treating container. The treating system has the treating container for receiving an object to be treated, a treating fluid generating section for generating the treating fluid, a treating-side flow path for supplying the treating fluid, which is generated by the treating fluid generating section, into the treating container, and a discharge flow path for discharging the treating fluid from the treating container.The treating system further has a bypass-side flow path connected at its downstream end to the discharge flow path and discharging the treating fluid, generated by the treating fluid generation section, without supplying it into the treating container, a pressure control mechanism provided in the discharge flow path, on the downstream side of the position at which the downstream end of the bypass-side flow path is connected to the discharge flow path, and a switchover valve for selectively connecting a flow path, into which the treating fluid generated by the treating fluid generation section is delivered, to the treating-side flow path and to the bypass-side flow path.</p> |
