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发明名称
HALBLEITERREINIGUNGSLÖSUNG
摘要
申请公布号
DE602004009584(T2)
申请公布日期
2008.08.07
申请号
DE200460009584T
申请日期
2004.06.26
申请人
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC);AIR PRODUCTS AND CHEMICALS INC.
发明人
VOS, RITA;MERTENS, PAUL;KOLBESEN, BERND;FESTER, ALBRECHT;DOLL, OLIVER
分类号
C11D11/00;C11D3/39;C11D7/32;C11D7/34;H01L21/02
主分类号
C11D11/00
代理机构
代理人
主权项
地址
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