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发明名称
Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
摘要
申请公布号
DE60227218(D1)
申请公布日期
2008.08.07
申请号
DE20026027218
申请日期
2002.06.11
申请人
ASML NETHERLANDS B.V.
发明人
KROON, MARK;VAN DER WERF, JAN EVERT;KOK, HAICO VICTOR
分类号
G03F7/20;G03F9/00;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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