| 摘要 |
PROBLEM TO BE SOLVED: To prevent a change in pressure of a treatment bath when introducing a supercritical fluid mixed with a chemical into the treatment bath in a treatment method of treating a substrate to be treated using the supercritical fluid as a medium. SOLUTION: In the substrate treatment method, the supercritical fluid is directly supplied to the treatment bath 22 to make the inside of the treatment bath 22 to a desired treatment pressure, and then the supercritical fluid mixed with the chemical is introduced into the treatment bath 22 from a mixing portion 25. COPYRIGHT: (C)2008,JPO&INPIT
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