| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting apparatus illuminating a desired region on a substance to be illuminated by an illuminating light having high uniformity and parallelisation (a telecentric property), even in the case of not only a low illuminance but also a high illuminance. SOLUTION: The lighting apparatus 1 has: a main light source 11 and an auxiliary light source 12; and an illuminating optical system 13 as an endless conjugate image-side telecentric optical system arranging a specified region on the substance to be illuminated on the image side. The main light source 11 illuminates a first region containing the illuminating optical system 13 on the focal plane FC of the illuminating optical system 13, and the auxiliary light source 12 is controlled apart from the main light source 11 and illuminates a second region placed around the first region on the focal plane FC. Accordingly, the specified region on the substance to be illuminated is illuminated changeably with an illuminating light having a uniform illuminance distribution and a specified first illuminance, and an illuminating light having a second illuminance higher than the first illuminance. COPYRIGHT: (C)2008,JPO&INPIT
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