| 摘要 |
A substrate transfer apparatus is provided to prevent a substrate from slipping on rollers due to inertia when starting or stopping transfer of the substrate by installing contact members on outer peripheral surfaces of the rollers. A substrate transfer apparatus includes fixed blocks(110), rotary shafts(120), rollers(130), driving members, and contact members(140). The fixed blocks are installed inside a process chamber longitudinally to face each other. The rotary shafts are installed through the fixed blocks to be spaced apart from each other. The rollers are connected to one sides of the rotary shafts respectively. The driving members are installed at the other sides of the rotary shafts to rotate the rotary shafts. The contact members are installed on outer peripheral surfaces of the rollers to be in contact with an edge of a substrate(G).
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