| 摘要 |
A low voltage driven piezoelectric microspeaker and a method for producing the same are provided to generate large strain with the same applied voltage. A method of producing a low voltage driven piezoelectric microspeaker includes the steps of preparing a substrate(105) made of a silicon wafer and depositing a silicon nitride layer through a low pressure chemical vapor deposition method on upper and lower surfaces of the substrate to form a diaphragm(110) functioning as a vibration plate of the microspeaker(S110), forming a primary electrode(120) on the center part of upper surface of the diaphragm(S120), depositing a piezoelectric thin film(130) on the diaphragm(S130), forming secondary electrodes(140,145) on an upper region of the piezoelectric thin film corresponding to the first electrode(S140), and exposing the center part of a lower surface of the diaphragm by removing a lower surface of the substrate(S150). |
