发明名称
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a nozzle for laser beam machining which is constituted so as to irradiate the surface of a work with a laser beam and cut off the outer air from a machining point of the work irradiated with the laser beam, and a laser beam machine using the nozzle. <P>SOLUTION: In the laser machining nozzle 18, a laser irradiating opening 73 for passing the laser beam opens at the center of a bottom face, and first gas jetting openings 74, 76 open on the outside of the laser irradiating opening 73. Further, second gas jetting openings 78, 80 open on the outside of the first gas jetting openings 74, 76, and gas suction opening 82, 84 open on the outside of the second gas jetting openings 78, 80. The gas suction openings 82, 84 is communicated with gas suction channels 26a, 26b and suck gases jetted from the first gas jetting openings 74, 76 and the second gas jetting openings 78, 80 disposed on the inside of the same and the outer air mixed into the gap S between the laser machining nozzle 18 and the work 14 due to the movement of the work 14 by means of the suction force of a vacuum pump 30. Accordingly, it becomes possible to shield so as to prevent the outer air to come into the vicinity of the machining point of the work 14 irradiated with the laser beam. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP4130790(B2) 申请公布日期 2008.08.06
申请号 JP20030307512 申请日期 2003.08.29
申请人 发明人
分类号 B23K26/06;B23K26/14;H01L21/268 主分类号 B23K26/06
代理机构 代理人
主权项
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