| 摘要 |
An electrostatic chuck and a semiconductor manufacturing apparatus are provided to reduce the generation of particles by forming a pin hole tube with the same material as a pin and a pin fixing plate. A chuck plate(121) is formed to support a substrate. A chuck body(122) is formed at a lower part of the chuck plate. A pin hole(124) penetrates the chuck plate and the chuck body. A pin(123) is moved in the inside of the pin hole. A pin fixing plate(127) is used for fixing the pin. A pin hole tube(125) is formed in the inside of the pin hole. The pin hole tube is made of a material having the same hardness as the pin. The pin and the pin hole tube are made of ceramics. The chuck plate is made of ceramics and the chuck body is made of aluminum.
|
