A probe station is provided to accurately select a position of a component to be tested by using a chuck driving stage and a probe driving stage. A chuck(211) is mounted in a box type case(270). A component is placed on the chuck. A chuck driving stage independently drives the chuck in forward/backward and left/right directions. A sample is probed by a probe(231), which is connected to a holder(233). A probe driving stage moves the holder in forward/backward and left/right directions from outside. An optical microscope(315) is installed on an upper surface of the case, such that a contact between the component and the probe is observed. A microscope adjusting stage adjusts a position of the microscope in up/down and left/right directions. Transparent windows(316) are installed on upper and front surfaces of the case. A coupling tube introduces and drains gas into and from the case. A probe connection line delivers an electrical signal from the probe to an analyzer.
