Substrate comprising two antireflective silicone resin layers between an organic layer and a photoresist layer, method for producing the same and patterning process using the same,申请号EP20060256130-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	Substrate comprising two antireflective silicone resin layers between an organic layer and a photoresist layer, method for producing the same and patterning process using the same
摘要
申请公布号	EP1801619(B1)	申请公布日期	2008.08.06
申请号	EP20060256130	申请日期	2006.11.30
申请人	SHIN-ETSU CHEMICAL CO., LTD.	发明人	OGIHARA, TSUTOMU;UEDA, TAKAFUMI
分类号	G03F7/09	主分类号	G03F7/09
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SOLAR-POWERED COOLER FOR COOLING INDOOR ELECTRONIC DEVICE OF VEHICLE

NETWORK NODE, USER EQUIPMENT AND METHODS FOR DETERMINING HARQ CONFIGURATION

BRUSHLESS DIRECT CURRENT MOTOR HAVING SFOC CONTROL

METHOD FOR MANUFACTURING LAMINATED GLASS AND LAMINATED GLASS MANUFACTURED THEREBY

METHODS OF TREATING CANCER USING GROWTH FACTOR RETARGETED ENDOPEPTIDASES

MEANS FOR THE FLOW OR STORAGE OF ALKALINE MEDIA AT HIGH TEMPERATURES

ABUTMENT CAPABLE OF ACCOMMODATING CORE CROWNS MANUFACTURED AT VARIOUS ANGLES AND FUNCTIONING AS A HEALING ABUTMENT HAVING A CAP ATTACHED THERETO, METHOD FOR MANUFACTURING DENTAL IMPLANT PROSTHESES USING THE ABUTMENT, AND METHOD FOR IMPLANT SURGERY USING THE ABUTMENT

RFID PATCH CORD IDENTIFICATION AND SIGNALING

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

METHODS AND SYSTEMS FOR OPERATING A POWER CONVERTER

METHOD OF OPERATING THERMAL AND THERMOELECTRIC SYSTEM

VACUUM HEAT TREATMENT APPARATUS

SUBSTRATES HAVING NANOSTRUCTURES HAVING BIOLOGICAL SPECIES IMMOBILIZED THEREON AND METHODS OF FORMING THE SAME AND METHODS OF FORMING NANOSTRUCTURES ON SURFACES

YARD WASTE BAG HOLDING APPARATUS

SEAT-BELT LOCK ASSEMBLY

SYSTEM FOR CREATING MUSICAL CONTENT USING A CLIENT TERMINAL

FLOW CELL FOR RADIATION DETECTOR

WIRELESS TERMINAL DEVICE AND MONITOR-LINKING SYSTEM COMPRISING SAME

DYNAMIC SOLAR ENERGY CONVERTER