发明名称 Production of flexural piezoelectric transducers
摘要 A method for the production of flexural piezoelectric transducers, which respectively have two mutually parallel bands 23, 24 separated from each other by a separating slit 30, said bands extending from a free band end to a foot zone (25, fig. 2), at which the two bands 23, 24 are joined. The severing slit 30 terminates at one foot zone slit end in the foot zone. The method comprises the following steps: <SL> <LI>(1) preparing a multi-layer piezoelectric substrate with a plurality of initial band structures and providing in each respective foot region an opening or hole 26a through the substrate; <LI>(2) the production of the respective separating slit 30 between two mutually associated initial band structures with a saw or similar with the result that it runs as far as the front portion 27a facing the free band ends of the opening 26a, and <LI>(3) separation of the substrate sheet 11 having the separating slits 30 by means of a separating tool to yield flexural piezoelectric transducers. </SL> The presence of the opening or hole 26a provides for a neater end to the slit so as to avoid cracking, flaking, etc. The opening or hole 26a may take on various forms (figs. 8, 12). A second hole 29a may also be provided.
申请公布号 GB2446252(A) 申请公布日期 2008.08.06
申请号 GB20070025019 申请日期 2007.12.21
申请人 FESTO AG & CO 发明人 MICHAEL WEINMANN;ANDREAS SCHMID;ALEXANDER SCHOLZ
分类号 H01L41/338;H01L41/39 主分类号 H01L41/338
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