| 摘要 |
An apparatus for manufacturing a flat display device is provided to detect the location of a substrate through a sensor installed on an opening, thereby preventing the substrate from being damaged. An apparatus for manufacturing a flat display device comprises a loadlock chamber, a process chamber(200), and an opening(210). The loadlock chamber has a transfer robot and makes a substrate(G) on standby temporarily before transferring the substrate to the process chamber. The process chamber is coupled with one surface of the loadlock chamber. The opening is formed in the coupling surface of the process chamber and the loadlock chamber so that the substrate is transferred between the process chamber and the loadlock chamber through the opening. A sensor(220) is mounted on the opening to detect the location of the substrate, thereby preventing damage to the substrate. |
