| 摘要 |
A probe card cleaner is provided to improve the cleanness of a probe card by downwardly directing a card plate having a probe card and raising a stage unit through a robot arm moving up and down. An elevating unit(10) transfers a probe card plate(50) with a clamp unit(12) through a robot arm(11) formed on the top of a machine(99). A drawer unit(20) draws out the card plate mounting a probe card for an examination to the front and the rear. A filter supplying unit(30A) supplies filters laminated in a mounting frame(60) by a load interlocking of an air cylinder(31A). A roll transfer unit(30) rotates a laminating roll(31) and a winding-in roll(32) fixed at both ends of right and left on a lower end of the machine with power of a rotational motor. A stage unit includes a cleaning chuck and a raising unit. The cleaning chuck is connected to the chemical tank, a distilled water tank, a vacuum tank, pumps, and a connecting hose in order to clean a needle tip. The raising unit raises the cleaning chuck through rotation of the motor. When the probe card is mounted on the card plate by drawing the drawer unit and the robot arm transfers the card plate to an upper end of the stage unit, the filter supplies cleaning solution and distilled water into the cleaning chuck to clean the needle tip of the probe card.
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