| 摘要 |
<p>The capacitor has successive conducting layers (19, 23, 27) separated by insulation layers (21, 25), and terminals (31, 33) in which the conducting and insulation layers are extended on a silicon substrate (1) and in hollowed portions i.e. rectangular shaped grooves (17), of the substrate. The terminal (31) is connected to the even order conducting layer (23), and the other terminal (33) is connected to the odd order conducting layers (19, 27). The insulation layers are made of silicon nitride. The conducting layers are made of doped polycrystalline silicon.</p> |
