发明名称 CATALYST TREATMENT METHOD, ELECTROLESS PLATING METHOD, AND METHOD FOR FORMATION OF CIRCUIT BY USING THE ELECTROLESS PLATING METHOD
摘要 A catalyst layer which enables an electroless plating method to be carried out can be formed by an inexpensive and simple process without using palladium. There are provided a tin treatment step of bringing a substrate into contact with a tin compound aqueous solution containing a tin compound; after the tin treatment step, a copper treatment step of bringing a substrate 1 into contact with a copper compound aqueous solution containing a copper compound; after the copper treatment step, a diluted sulfuric acid treatment step of bringing the substrate 1 into contact with diluted sulfuric acid; after the diluted sulfuric acid treatment step, a plating treatment step of bringing the substrate 1 into contact with a plating solution to form a copper plating film 2; and after the plating treatment step, a heat treatment step of heating the substrate 1 in an atmosphere substantially containing no oxygen and hydrogen.
申请公布号 EP1953262(A1) 申请公布日期 2008.08.06
申请号 EP20060811039 申请日期 2006.10.02
申请人 ALPS ELECTRIC CO., LTD. 发明人 MITSUMORI, KENICHI
分类号 C23C18/18;H05K3/18 主分类号 C23C18/18
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