发明名称 |
A TRI-AXIS ACCELEROMETER |
摘要 |
In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor. |
申请公布号 |
EP1952165(A2) |
申请公布日期 |
2008.08.06 |
申请号 |
EP20060837791 |
申请日期 |
2006.11.16 |
申请人 |
KIONIX, INC. |
发明人 |
ADAMS, SCOTT G.;MILLER, SCOTT A.;SHEN-EPSTEIN, JUNE;EPSTEIN, KEITH |
分类号 |
G01P15/08;G01P15/125;G01P15/18;H01L21/00 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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