发明名称 |
MICROWAVE PLASMA ABATEMENT APPARATUS |
摘要 |
<p>In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.</p> |
申请公布号 |
EP1951407(A1) |
申请公布日期 |
2008.08.06 |
申请号 |
EP20060794561 |
申请日期 |
2006.09.25 |
申请人 |
EDWARDS LIMITED |
发明人 |
RADOIU, MARILENA;SMITH, JAMES, ROBERT;SEELEY, ANDREW, JAMES |
分类号 |
B01D53/00;B01D53/32;H01J37/32 |
主分类号 |
B01D53/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|