发明名称 Methods and apparatus for transferring conductive pieces during semiconductor device fabrication
摘要 In a first aspect, a programmable transfer device is provided for transferring conductive pieces to electrode pads of a target substrate. The programmable transfer device includes (1) a transfer substrate; and (2) a plurality of individually addressable electrodes formed on the transfer substrate. Each electrode is adapted to selectively attract and hold a conductive piece during transfer of the conductive piece to an electrode pad of a target substrate. Numerous other aspects are provided.
申请公布号 US7407081(B2) 申请公布日期 2008.08.05
申请号 US20050095943 申请日期 2005.03.31
申请人 APPLIED MATERIALS, INC. 发明人 RICE MICHAEL R.;BJORKMAN CLAES H.;ZHAO JUN;COLLINS KENNETH S.;MIU THOMAS
分类号 B23K1/00;B23K3/06;B23Q16/00;B65G1/00;H01L21/00;H01L21/48;H01L21/60;H01L21/68;H05K3/34 主分类号 B23K1/00
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