发明名称 Capture of residual refractory metal within semiconductor device
摘要 There is provided a semiconductor device with a configuration in which a dummy silicide area 11 is provided in the vicinity of a non-silicide area 2 to easily capture residual refractory metals, resulting in an improved yield by preventing the trapping of residual refractory metals into a non-silicide area and thereby reducing a junction leakage within the non-silicide area.
申请公布号 US7408239(B2) 申请公布日期 2008.08.05
申请号 US20070650978 申请日期 2007.01.09
申请人 RENESAS TECHNOLOGY CORP. 发明人 KAMINO TAKESHI;TSUTSUMI TOSHIAKI;KODAMA SHUJI;OHNO TAKIO
分类号 H01L21/28;H01L29/00;H01L21/02;H01L21/24;H01L21/3205;H01L21/822;H01L23/26;H01L23/52;H01L27/04;H01L27/08 主分类号 H01L21/28
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