| 摘要 |
A method and an apparatus of drying a substrate are provided to improve a drying efficiency of the substrate by lowering a humidity level in a drying chamber by removing moistures from the air inside the drying chamber. An apparatus of drying a substrate includes a drying chamber(11), a demoisturizing unit(100), and a demoisturizing member. A substrate is received in the drying chamber. The demoisturizing unit is provided in the drying chamber. The demoisturizing member is received in the demoisturizing unit and absorbs the moisture, which is included in the air in the drying chamber. The demoisturizing member includes a liquid demoisturizer. The demoisturizer is LiBr. The demoisturizing unit includes a housing and a cover.
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