发明名称 Method and apparatus for monitoring the thickness of a conductive coating
摘要 A method and apparatus for determining thickness of a metallic layer being deposited on a collector. The method includes applying an electromagnetic field to a conductive layer on the collector. Then the temperature or the change in temperature of the collector is determined. The metal thickness is determined as a function of the temperature or change in temperature. The apparatus includes a collector, a thermocouple associated with the collector, and a source of an electromagnetic field.
申请公布号 US7407324(B2) 申请公布日期 2008.08.05
申请号 US20050200013 申请日期 2005.08.10
申请人 TOKYO ELECTRON, LTD. 发明人 BRCKA JOZEF
分类号 G01N25/00;G01K19/00 主分类号 G01N25/00
代理机构 代理人
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