| 摘要 |
The method manufactures a liquid ejection head comprising: a plurality of nozzles which eject liquid; a plurality of pressure chambers which are connected to the nozzles, respectively; a diaphragm which forms wall faces of the pressure chambers; and piezoelectric elements which are disposed on the diaphragm at positions corresponding to the pressure chambers and each are formed of at least a piezoelectric material and electrodes overlapping each other. The method comprises the steps of: forming a lower electrode on a whole surface of a substrate that is to form the diaphragm; then forming piezoelectric material by screen printing onto a whole surface of the lower electrode; then forming an upper electrode on a whole surface of the piezoelectric material; then forming a mask having a prescribed pattern on the upper electrode; then dividing the piezoelectric material and the upper electrode by performing a sandblasting process through the mask; and then calcining the substrate together with the divided piezoelectric material and upper electrode.
|
