发明名称 SILPHENYLENE-BEARING POLYMER, PHOTO-CURABLE RESIN COMPOSITION, PATTERNING PROCESS, AND SUBSTRATE CIRCUIT PROTECTIVE FILM
摘要 <p>A polymer compound containing a silphenylene structure, a radiation curing resin composition containing the polymer compound, a method for forming a pattern by using the composition, and a film for protecting a circuit board using the pattern formed by the method are provided to form a micropattern having a wide range of thickness from 1 micrometer or less to 20 micrometers or more. A polymer compound containing a silphenylene structure comprises a repeating unit represented by the formula 1 and has a weight average molecular weight of 3,000-500,000, wherein R1 to R4 are identical or different one another and are a C1-C8 monovalent hydrocarbon group; m is an integer of 1-100; a is a positive integer; b is 0 or a positive integer; 0.5<=a/(a+b)<=1.0; X is a divalent organic group represented by the formula 2; Y is a divalent organic group; n is 0 or 1; R5 and R6 are identical or different one another and are a C1-C5 alkyl or alkoxy group; and k is 0, 1 or 2.</p>
申请公布号 KR20080071902(A) 申请公布日期 2008.08.05
申请号 KR20080008049 申请日期 2008.01.25
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 KATO HIDETO;ASAI SATOSHI
分类号 G03F7/004 主分类号 G03F7/004
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