发明名称 |
Fabrication and use of superlattice |
摘要 |
This disclosure relates to a system and method for fabricating and using a superlattice. A superlattice can be fabricated by applying alternating material layers on a ridge and then removing some of the alternating layers to expose edges. These exposed edges can be of nearly arbitrary length and curvature. These edges can be used to fabricate an array of nano-scale-width curved wires.
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申请公布号 |
US7407738(B2) |
申请公布日期 |
2008.08.05 |
申请号 |
US20040817729 |
申请日期 |
2004.04.02 |
申请人 |
KORNILOVICH PAVEL;MARDILOVICH PETER;STASIAK JAMES;THIRUKKOVALUR NIRANJAN |
发明人 |
KORNILOVICH PAVEL;MARDILOVICH PETER;STASIAK JAMES;THIRUKKOVALUR NIRANJAN |
分类号 |
G03F7/00;C23C4/12;C23C4/18;C30B29/68;G03F7/40;H01L21/00;H01L21/48;H01L21/768;H05K3/20 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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