发明名称 Fabrication and use of superlattice
摘要 This disclosure relates to a system and method for fabricating and using a superlattice. A superlattice can be fabricated by applying alternating material layers on a ridge and then removing some of the alternating layers to expose edges. These exposed edges can be of nearly arbitrary length and curvature. These edges can be used to fabricate an array of nano-scale-width curved wires.
申请公布号 US7407738(B2) 申请公布日期 2008.08.05
申请号 US20040817729 申请日期 2004.04.02
申请人 KORNILOVICH PAVEL;MARDILOVICH PETER;STASIAK JAMES;THIRUKKOVALUR NIRANJAN 发明人 KORNILOVICH PAVEL;MARDILOVICH PETER;STASIAK JAMES;THIRUKKOVALUR NIRANJAN
分类号 G03F7/00;C23C4/12;C23C4/18;C30B29/68;G03F7/40;H01L21/00;H01L21/48;H01L21/768;H05K3/20 主分类号 G03F7/00
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