发明名称 Micromirror array device with compliant adhesive
摘要 A microstructure is packaged with a device substrate of the microstructure being attached to a package substrate. For dissipating possible deformation of the microstructure, which may result in device failure or quality degradation of the microstructure, an adhesive material comprising a compliant adhesive component is applied and positioned between the device substrate and package substrate.
申请公布号 US7408250(B2) 申请公布日期 2008.08.05
申请号 US20050100104 申请日期 2005.04.05
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 DOAN JONATHAN;TARN TERRY
分类号 H01L23/02 主分类号 H01L23/02
代理机构 代理人
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