| 摘要 |
<p>The invention relates to a liquid distribution unit ( 10, 20 ) for dividing a liquid current into a plurality of partial currents. Said unit comprises at least one liquid inlet ( 13, 23 ) for the supplied liquid current, a plurality of liquid outlets ( 14; 24 ) for the partial currents, and a plurality of channels ( 15, 25 ) connecting the liquid inlets ( 13, 23 ) to the liquid outlets ( 14, 24 ). Said unit is characterised in that the channels ( 15, 25 ) symmetrically and respectively branch off ( 16, 26 ) into upstream channels ( 15 a, 15 b, 15 c , 15 d , 15 c ; 25 a , 25 b , 25 c , 25 d , 25 c) and each connection leading from the liquid inlet ( 13; 23 ) to one of the liquid outlets ( 14; 24 ) comprises the same channels ( 15, 25 ) and the same branches ( 16, 26 ). A liquid distribution device for the divided distributiion of at least two different liquids; comprises a plurality of such liquid distribution units ( 10, 20 ) placed flatly on top of each other. One of the liquids is distributed in each liquid distribution unit ( 10, 20 ) and the other(s) is/are guided through separate passages ( 17, 27 ) in an undistributed manner. One such liquid distribution device can especially be embodied as a device for supplying gases for a CVD coating installation. In this case, at least one liquid distribution unit ( 10 ) is provided for a precursor gas optionally having a carrier gas, and at least one other liquid distribution unit ( 20 ) is provided for a reactive gas.</p> |
