| 摘要 |
Ozone supply facilities are provided to safely protect components in case of leakage of ozone fluid and to evenly supply the ozone to the entire storage spaces. Ozone supply facilities include: an ozone supply unit(10) for generating and supplying ozone; a plurality of supply tubes(50) for supplying the ozone from the ozone supply unit to a plurality of storage spaces(71,72,73); and a plurality of injection tubes(60) installed in the respective storage spaces. In the meantime, the supply tubes include a main supply tube(51) connected to an ozone generator(30) and provided with a branch header(52), and a plurality of branched supply tubes(53,54,55) branched from the branch header of the main supply tube and connected to the injection tubes of the respective storage spaces, for supplying the ozone to the respective storage spaces. As a result, the ozone can be supplied to the whole storage spaces. |
