PLASMA SHIELD FOR PROTECTING SEMICONDUCTOR CIRCUIT AREA

摘要

A plasma shielding layer for protecting a semiconductor circuit area is provided to prevent generation of arc defects caused by parasitic plasma. A plasma shielding layer(106) is used for protecting a semiconductor circuit area in a process for removing impurities from a wafer edge region. The plasma shielding layer is attached to an upper surface of a wafer to prevent permeation of plasma for removing the impurities to the semiconductor circuit region. The plasma shielding layer is made of a material layer. The material layer does not cause scratches on a surface of the wafer and includes a resistance to the plasma. The material layer is made of Teflon.