SEMICONDUCTOR MANUFACTURING APPARATUS HAVING GAS LINE MOUNTED WITH BLOCK HEATER

摘要

A semiconductor manufacturing apparatus having a gas line mounted with a block heater is provided to improve semiconductor manufacturing efficiency by transmitting efficiently a vaporized gas to a chamber. A block heater(4) for air pressure valve manifold is installed at an air pressure valve manifold(2) including an air pressure valve(1) to surround the air pressure valve manifold. A block heater for gas line is installed at a gas line to surround the gas line. The block heater is made of an aluminum material having a high temperature-transmitting characteristic. A surface of the block heater is processed by using a hard-anodizing method. The volume of the block heater is minimized to transmit uniform temperature to the gas line and the air pressure valve manifold.