| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for manufacturing semiconductor which prevents the atmosphere from entering the inner part of a nozzle-standby tank, to restrain the clogging of a pipe during standby. SOLUTION: The device for manufacturing semiconductor is provided with a stage which holds a semiconductor wefar and rotates; a nozzle 20 having in its lower part a feeding hole which feeds a chemical liquid to the surface of the semiconductor wefar held on the stage, and the chemical liquid reacting with the atmosphere to harden; a nozzle-standby tank 10 which is arranged at a standby position of the nozzle 20 and has in its upper face an aperture part 12, in which the lower part of the nozzle 20 is inserted; and a cover 14 which is fixed to a part above the feeding hole of the nozzle 20 and closes the aperture part 12, when the lower part of the nozzle 20 is inserted in the aperture part 12. COPYRIGHT: (C)2008,JPO&INPIT
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