| 摘要 |
PROBLEM TO BE SOLVED: To provide a paste coating apparatus capable of performing the good coating with paste by preventing the lowering of product quality to the utmost, and a paste coating method. SOLUTION: A coating head 6 is supported on the beam-like member 5a of the gate-shaped frame 5 so arranged as to straddle a stage 4 in a freely horizontally movable manner through a guide device 8. The guide device 8 has the guide rail fixed to the beam-like member 5a and the movable stand provided to the guide rail on a freely slidable manner to be fixed on the side of the coating head 6. Further, a plurality of vacuum suction holes is provided to the beam-like member 5a at predetermined intervals along the guide rail and each of the vacuum suction holes is connected to a vacuum source through piping having a solenoid valve. COPYRIGHT: (C)2008,JPO&INPIT
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