发明名称 |
PROBE CARD ASSEMBLY AND KIT |
摘要 |
In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.
|
申请公布号 |
US2008180121(A1) |
申请公布日期 |
2008.07.31 |
申请号 |
US20080060753 |
申请日期 |
2008.04.01 |
申请人 |
FORMFACTOR, INC. |
发明人 |
KHANDROS IGOR Y.;SPORCK A. NICHOLAS;ELDRDGE BENJAMIN N. |
分类号 |
G01R1/073;B23K1/00;B23K20/00;C23C18/16;C25D5/08;C25D5/22;C25D7/12;C25D21/02;G01R1/04;G01R1/067;G01R31/28;H01L21/00;H01L21/48;H01L21/56;H01L21/60;H01L21/603;H01L21/66;H01L23/48;H01L23/485;H01L23/49;H01L23/498;H01L25/065;H01L25/16;H05K1/14;H05K3/20;H05K3/30;H05K3/32;H05K3/34;H05K3/36;H05K3/40;H05K7/10 |
主分类号 |
G01R1/073 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|