| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect detection device and its method capable of detecting a linear defect on a test object with high accuracy. <P>SOLUTION: A step S301 calculates an additional value of the pixel value of each pixel arranged in a predetermined direction of an image taken of a test object. A step S304 calculates a standard deviation value as an index value that indicates uniformity in the pixel values of the respective pixels arranged in the predetermined direction of the image. A step S308 corrects the additional value based on the standard deviation value. A step S309 determines presence or absence of a linear defect on the test object based on a result of comparing the corrected additional value with a threshold value. <P>COPYRIGHT: (C)2008,JPO&INPIT |
