| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of rotating a magnetic field in a process chamber. <P>SOLUTION: In one embodiment, a method of rotating a magnetic field in a process chamber comprises: a step of forming a magnetic field having a primary shape; a step of changing the primary shape to at least two sequential transitional shapes; and a step of changing the transitional shapes to a rotated primary shape. Optionally, the magnetic field is maintained at an approximately constant magnitude throughout each step. Optionally, a maximum value of one current applied to one or more magnetic field generating coils is equal to zero, or the polarity is reversed between any two adjacent steps. <P>COPYRIGHT: (C)2008,JPO&INPIT |
