| 摘要 |
PROBLEM TO BE SOLVED: To provide a board inspection system using a linear scale probe which houses a movable shaft fitted with a magnetic material disposed in a magnetic field excited with high-frequency power and electrically detects a state of move of the movable shaft. SOLUTION: The board inspection system includes an inspection panel on which a plurality of linear scale probes are arranged, each linear scale probe having a movable shaft that comes into contact with each of electronic components mounted on a board. When the inspection panel is put on the board, the movable shaft in contact with the electronic component moves, causing the magnetic material to move in a magnetic field generated from an exciting coil to which high-frequency power is applied in the linear scale probe. The move of the magnetic material in the magnetic field is detected by detecting coils, which outputs a voltage signal upon detection of the move. Based on the voltage signal, the presence/absence and mounting state of an electronic component to be mounted on the board are inspected and determined. COPYRIGHT: (C)2008,JPO&INPIT
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