| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of performing a defect inspection of a display panel not only for an image forming surface but also other areas, and capable of performing reduction in size and reduction in cost, and to provide a method therefor. SOLUTION: The defect inspection of a panel 2 to be inspected transmits parallel light fluxes PL from a light condensing lens 13 to the image region of the panel 2 and directly projects a defect in the image region of the panel 2 to a CCD sensor 25. That is, since a projection optical system and an imaging lens are not used, a deterioration of a pick-up image can significantly be reduced and an object to be images can be applied not only to the image forming surface of the panel 2 but also other areas. Accordingly, the defect detecting accuracy of the panel 2 can be improved. The defect inspection device is mainly formed of only the light condensing lens 13 and the CCD sensor 25 as major components, and thus the device can be reduced in size and in cost. COPYRIGHT: (C)2008,JPO&INPIT
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