| 摘要 |
A positioning device includes an object table, a sub-system for processing an object to be placed on the object table, a drive unit for displacing the object table relative to the sub-system, and a measuring system for measuring a position of the object table relative to the sub-system. The drive unit includes a stationary part which is fastened to a first frame of the positioning device, while the measuring system includes a stationary part and a movable part which is fastened to the object table for cooperation with the stationary part of the measuring system. The stationary part of the measuring system is fastened to a second frame of the positioning device which is dynamically isolated from the first frame.
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