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发明名称
Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
摘要
申请公布号
DE602006001507(D1)
申请公布日期
2008.07.31
申请号
DE200660001507T
申请日期
2006.11.28
申请人
ASML NETHERLANDS B.V.;ASML HOLDING, N.V.
发明人
VISSER, HUIBERT;CALLAN, DAVID WILLIAM;MUNNIG SCHMIDT, ROBERT-HAN;WIENER, ROBERTO;VAN DE VEN, JOHANNES T. G.;ROBBINS, GEORGE HOWARD
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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