| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To judge whether a presently set inspection condition is a condition fitted to an actual sample in a visual examination device for detecting the flaw present on the surface to be inspected of a sample by inspecting the image acquired by photographing the surface to be inspected of the sample, and also to provide a visual examination method using it. <P>SOLUTION: The visual examination device 1 is equipped with: flaw detection parts 20 and 24 for inputting the image acquired by photographing the surface to be inspected of the sample 2 to detect the flaw present in the image; a standard flaw data memory part 61 for storing the position data of the known standard flaw 9 preliminarily provided to the surface of the sample 2 being the inspection target; and a detection sensitivity judging part 50 for judging whether the standard flaw 9 present at the position, which is shown by the position data stored in the standard flaw data memory part 61, in the image obtained by photographing the surface of the sample 2 provided with the standard flaw 9 is detected by the flaw detection parts 20 and 24. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
