| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming an organic thin film, formed of a self-organized single molecular film that does not include many defects inside the film. SOLUTION: The method for forming an organic thin film comprises a first step for supplying a gas, including coupling organic molecules to the front surface of a substrate 102, after the gas within a reaction chamber 101 wherein a substrate 102 for film formation is arranged is evacuated; a second step for chemically coupling the organic molecular within the reaction chamber 101 to the front surface of the substrate 102; and a third step for evacuating nonreactive organic molecules within the reaction chamber 101 and on the front surface of substrate 102 by evacuating the reaction chamber 101. The processes from the first step to the third step are conducted once or more number of times. COPYRIGHT: (C)2008,JPO&INPIT |
