发明名称 METHOD FOR MANUFACTURING REFLECTION MIRROR AND OPTICAL INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide a reflection mirror exhibiting a uniform and high reflectivity at least in the visible light region. SOLUTION: In the method for manufacturing the reflection mirror 19 by forming a reflection film 22 using silver on a substrate 20 and then forming a first protective layer 23 using aluminum oxide and a second protective layer 24 using a titanium compound on the reflection film 22, the reflection film 22 is vapor-deposited at a film deposition rate higher than at least one of the first protective layer 23 and the second protective layer 24. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008175929(A) 申请公布日期 2008.07.31
申请号 JP20070007635 申请日期 2007.01.17
申请人 NIKON CORP 发明人 IKETANI SHIGERU;OBATA TAKASHI
分类号 G02B5/08 主分类号 G02B5/08
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