| 摘要 |
PROBLEM TO BE SOLVED: To detect the intensity of a laser beam emitted from the front end of an objective lens with simplicity and satisfactory accuracy in spite of a change in the wavelength and intensity of the laser beam and to irradiate a sample with a laser beam of the accurately set intensity. SOLUTION: There is provided the laser microscope, which includes a laser light source 13 emitting a high-output laser beam L<SB>4</SB>and an objective lens 20 irradiating the sample A with the laser beam L<SB>5</SB>emitted from the laser light source 13, wherein a beam splitter 33 arranged between the laser light source 13 and the objective lens 20 and branching a portion of the laser beam L<SB>5</SB>from the laser light source 13, a light quantity detecting means 34 detecting the light quantity of the laser beam L3 branched from the beam splitter 33, and a diaphragm device 35 arranged between the light quantity detecting means 34 and the beam splitter 33 and limiting a luminous flux diameter are provided. COPYRIGHT: (C)2008,JPO&INPIT
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