| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device for obtaining two-dimensional information and three-dimensional information of a body to be inspected, so that measuring errors due to the aberrations of a usage lens will not occur, and to provide a measurement method. SOLUTION: The measuring device for measuring irregular shape on the surface of a substrate and the height of a foreign matter includes: a stage for mounting to arrange and horizontally conveying an article to be inspected, forming irregularities on the surface of a flat plate-like substrate, and an article of the shape known in which the same as the article to be inspected and its shape are known; light sources irradiating the article to be inspected and the shape known articles with illumination light, respectively; an imaging means for using a line sensor camera installed, in a state where the light axis is inclined at 45 degrees to the surface of the shape known article and the article to be inspected; an optical distribution element for integrating the optical paths of each reflected light from the article of the shape known and the article to be inspected into one; a shutter means installed among the optical distribution element, the article to be inspected and the article of the shape known, respectively; and a means for processing images by storing image data captured by the imaging means. The measuring method is also provided. COPYRIGHT: (C)2008,JPO&INPIT
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