| 摘要 |
PROBLEM TO BE SOLVED: To speed up inspecting by shortening the gas filling time while dispensing with a cooling process in the method of an inspecting air tightness of the inspecting object by filling the inspecting object with helium gas and detecting the leakage helium gas. SOLUTION: By the method and device for inspection as mentioned above, the range of 1/3 to 1/2 volume of object is filled with the liquid, solid or mixture of them of large heat capacity; thereafter the object is filled with helium gas. Then the first inspection for the air tightness is performed, and the second inspection of the above airtightness is performed after inverting the inspection object. COPYRIGHT: (C)2008,JPO&INPIT
|
