| 摘要 |
PROBLEM TO BE SOLVED: To provide a stocker capable of transferring an FOUP (Front-Opening Unified Pod) without stopping a conveyor. SOLUTION: The stocker 1 is arranged adjacent a conveyor 3 for conveying an FOUP 2 in a manufacturing process. The stocker 1 comprises a pickup robot 40 which picks up the FOUP 2 moving on the conveyor 3 and places the FOUP 2 on the conveyor 3, a port 30 for conveying in/conveying out the FOUP 2, shelves 10a and 10b for storing the FOUP 2, and a stacker crane 20 which transfers the FOUP 2 loaded in the port 30 to the shelf 10a or 10b, and transfers the FOUP 2 stored on the shelf 10a or 10b to the port 30. COPYRIGHT: (C)2008,JPO&INPIT
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