发明名称 |
LIQUID RECOVERY SYSTEM, IMMERSION EXPOSURE APPARATUS, IMMERSION EXPOSING METHOD, AND DEVICE FABRICATING METHOD |
摘要 |
A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system is provided with: a first opening; a gap portion that is provided so that a liquid on an object that opposes the first opening can flow into the gap portion through the first opening; a liquid recovery part that suctions, through a porous member, at least part of the liquid that flows into the gap portion; and a second opening that is different from the first opening. The gap portion is open to the atmosphere through the second opening. |
申请公布号 |
WO2008091014(A2) |
申请公布日期 |
2008.07.31 |
申请号 |
WO2008JP51328 |
申请日期 |
2008.01.23 |
申请人 |
NIKON CORPORATION;NAGASAKA, HIROYUKI |
发明人 |
NAGASAKA, HIROYUKI |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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