DIAMOND ELECTRONIC DEVICES AND METHODS FOR THEIR MANUFACTURE

摘要

The present invention relates to a diamond electronic device comprising a functional interface between two solid materials, wherein the interface is formed by a planar first surface of a first layer of single crystal diamond and a second layer formed on the first surface of the first diamond layer, the second layer being solid, non-metallic and selected from diamond, a polar material and a dielectric material, and wherein the planar first surface of the first layer of single crystal diamond has an Rq of less than 10 nm and has at least one of the following characteristics: (a) the first surface is an etched surface; (b) a density of dislocations in the first diamond layer breaking the first surface is less than 400 cm^-2 measured over an area greater than 0.014 cm²; (c) a density of dislocations in the second layer breaking a notional or real surface lying within the second layer parallel to the interface and within 50 µm of the interface is less than 400 cm^-2 measured over an area greater than 0.014 cm²; and (d) the first surface has an R_q less than 1 nm.