| 发明名称 |
LINE BEAM FORMING METHOD, LINE BEAM FORMING DEVICE, AND LASER PROCESSING APPARATUS HAVING THE DEVICE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently form a line beam having a constant intensity. <P>SOLUTION: A method of shaping a beam in the form of a line has a beam quality conversion step of dividing an incident laser beam into a predetermined number of beams and rearranging the divided beams in an array different from the array of the incident laser beam, and a homogenizing step of causing the laser beams obtained by the beam quality conversion step to have a constant intensity. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
| 申请公布号 |
JP2008177372(A) |
申请公布日期 |
2008.07.31 |
| 申请号 |
JP20070009602 |
申请日期 |
2007.01.18 |
| 申请人 |
SUMITOMO HEAVY IND LTD |
发明人 |
SEIKE KOJI;YAMAZAKI KAZUNORI |
| 分类号 |
H01L21/268;B23K26/073;B23K101/40;G02B27/09;H01L21/20 |
主分类号 |
H01L21/268 |
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