| 摘要 |
PROBLEM TO BE SOLVED: To maximally extract effects of the improvement of light-receiving efficiency using an optical waveguide in a solid-state imaging element. SOLUTION: A CCD image sensor 2 is provided with: a plurality of light-receiving sections 10 disposed on a substrate 20 and receiving light to execute photoelectric conversion; a transfer electrode 26 applied with a driving voltage for transferring electric charges accumulated in the light-receiving sections 10; an optical waveguide 30 composed of core layers 31 formed so as to have substantially the same widths over the light-receiving section 10 side and the light incidence side and guiding light toward an opening 28 of the light-receiving sections 10, and a clad layer 32 having a refractive index lower than that of the core layer 31 and surrounding the core layer 31; and a microlens 34 for collecting light on the incident surface 30a of the optical waveguide 30. The effective diameter D of the microlens 34 and the width d of the opening are decided so that light-receiving efficiency can be improved compared to an apparatus having no optical waveguide 30 where the width of the transfer electrode 26 is constant. COPYRIGHT: (C)2008,JPO&INPIT
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